Microlithography

Microlithography

EnglishPaperback / softbackPrint on demand
Taylor & Francis Ltd
EAN: 9781032836737
Print on demand
Delivery on Wednesday, 7. of May 2025
CZK 1,022
Common price CZK 1,460
Discount 30%
pc
Do you want this product today?
Oxford Bookshop Praha Korunní
not available
Librairie Francophone Praha Štěpánská
not available
Oxford Bookshop Ostrava
not available
Oxford Bookshop Olomouc
not available
Oxford Bookshop Plzeň
not available
Oxford Bookshop Brno
not available
Oxford Bookshop Hradec Králové
not available
Oxford Bookshop České Budějovice
not available
Oxford Bookshop Liberec
not available

Detailed information

The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been necessary to drive semiconductor lithography toward nanometer-scale generations. Renowned experts from the world�€�s leading academic and industrial organizations have provided in-depth coverage of the technologies involved in optical, deep-ultraviolet (DUV), immersion, multiple patterning, extreme ultraviolet (EUV), maskless, nanoimprint, and directed self-assembly lithography, together with comprehensive descriptions of the advanced materials and processes involved.

New in the Third Edition

In addition to the full revision of existing chapters, this new Third Edition features coverage of the technologies that have emerged over the past several years, including multiple patterning lithography, design for manufacturing, design process technology co-optimization, maskless lithography, and directed self-assembly. New advances in lithography modeling are covered as well as fully updated information detailing the new technologies, systems, materials, and processes for optical UV, DUV, immersion, and EUV lithography.

The Third Edition of Microlithography: Science and Technology authoritatively covers the science and engineering involved in the latest generations of microlithography and looks ahead to the future systems and technologies that will bring the next generations to fruition.

Loaded with illustrations, equations, tables, and time-saving references to the most current technology, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to better understand the complex world of microlithography science and technology.

EAN 9781032836737
ISBN 1032836733
Binding Paperback / softback
Publisher Taylor & Francis Ltd
Publication date June 24, 2024
Pages 850
Language English
Dimensions 254 x 178
Country United Kingdom
Editors Smith Bruce W.; Suzuki Kazuaki
Manufacturer information
The manufacturer's contact information is currently not available online, we are working intensively on the axle. If you need information, write us on helpdesk@megabooks.sk, we will be happy to provide it.

Similar titles

Introduction to Environmental Data Science

Introduction to Environmental Data Science

Hsieh William W.
EnglishHardback
Cambridge University Press
ISBN: 9781107065550
On order
Delivery on Thursday, 17. of April 2025
On order
Delivery on Thursday, 17. of April 2025
CZK 1,947 -10%
Advanced Futures Trading Strategies

Advanced Futures Trading Strategies

Carver Robert
EnglishHardback
Harriman House Publishing
ISBN: 9780857199683
In stock 1 pc
Delivery on Thursday, 27. of March 2025
In stock 1 pc
Delivery on Thursday, 27. of March 2025
CZK 2,059 -20%
Using Economic Indicators in Analysing Financial Markets

Using Economic Indicators in Analysing Financial Markets

Krampen, Bernd
EnglishHardback
Emerald Publishing Limited
ISBN: 9781804553251
On order
Delivery on Monday, 14. of April 2025
On order
Delivery on Monday, 14. of April 2025
CZK 2,920 -20%
Multiscale Modelling in Biomedical Engineering

Multiscale Modelling in Biomedical Engineering

Fotiadis Dimitrios I.
EnglishHardback
John Wiley & Sons Inc
ISBN: 9781119517344
In stock 1 pc
Delivery on Thursday, 27. of March 2025
In stock 1 pc
Delivery on Thursday, 27. of March 2025
CZK 3,699 -10%
Nanomaterials for Sustainable Tribology

Nanomaterials for Sustainable Tribology

EnglishHardbackPrint on demand
Taylor & Francis Ltd
ISBN: 9781032306902
Print on demand
Delivery on Wednesday, 7. of May 2025
Print on demand
Delivery on Wednesday, 7. of May 2025
CZK 3,894 -20%
Introduction to Strain-Based Structural Health Monitoring of Civil Structures

Introduction to Strain-Based Structural Health Monitoring of Civil Structures

Glisic Branko
EnglishHardback
John Wiley & Sons Inc
ISBN: 9781118495353
In stock 2 pc
Delivery on Thursday, 27. of March 2025
In stock 2 pc
Delivery on Thursday, 27. of March 2025
CZK 2,434 -10%
Introduction to Materials Science and Engineering

Introduction to Materials Science and Engineering

Ashby Michael F.
EnglishPaperback / softback
Elsevier Science & Technology
ISBN: 9780081023990
In stock 1 pc
Delivery on Thursday, 27. of March 2025
In stock 1 pc
Delivery on Thursday, 27. of March 2025
CZK 2,270 -10%
Learning Google Analytics

Learning Google Analytics

Edmondson Mark
EnglishPaperback / softback
O'Reilly Media
ISBN: 9781098113087
In stock 1 pc
Delivery on Thursday, 27. of March 2025
In stock 1 pc
Delivery on Thursday, 27. of March 2025
CZK 1,720 -20%
Employment Relations

Employment Relations

Bingham Cecilie
EnglishPaperback / softback
SAGE Publications Ltd
ISBN: 9781529774788
On order
Delivery on Thursday, 17. of April 2025
On order
Delivery on Thursday, 17. of April 2025
CZK 1,492 -10%
Quality in the Era of Industry 4.0

Quality in the Era of Industry 4.0

Yang Kai
EnglishHardback
John Wiley & Sons Inc
ISBN: 9781119932444
On order
Delivery on Thursday, 17. of April 2025
On order
Delivery on Thursday, 17. of April 2025
CZK 2,353 -20%